Application of Pfeiffer molecular pump group in low-temperature vacuum probe station
Vacuum probe stations are generally used as instruments for surface observation and various performance testing of complex, high-speed and precision devices. Testing can ensure product quality and reliability, and reduce research and development time and device manufacturing process costs Probe stations are mainly used for testing in the semiconductor industry, optoelectronic industry, integrated circuits, and packaging

Why do we need a vacuum environment?
1. The vacuum probe station is used in conjunction with a molecular pump group, a vacuum adsorption chuck, and a vacuum adsorption probe holder to fix the sample and probe holder through air compression
2. Due to the detection of wafers at ultra-low temperatures, water vapor will appear and freeze the wafers Moisture can affect measurements and cause measurement failures The water vapor in the vacuum chamber needs to be discharged through a vacuum pump
When the wafer is heated above 300 degrees Celsius, 400 degrees Celsius, 500 degrees Celsius or higher, strong oxidation will occur The higher the temperature, the greater the oxidation on the surface of the silicon wafer, which will reduce the electrical, physical, and mechanical properties of the wafer The oxygen in the vacuum chamber needs to be expelled through a molecular pump system

Shanghai Bodong Turbomolecular Pump Unit Applied to Low Temperature Vacuum Probe Station Customer Case:A certain enterprise recommended the purchase of the German Pfeiffer economical molecular pump set HiCube 80 Eco through Shanghai Bodong. The molecular pump is perfectly combined with the diaphragm pump, and the overall design is plug and play, providing a clean, low vibration, and stable high vacuum environment

Shanghai Bodeng Pfeiffer Molecular Pump HiCube Eco Technical Specifications

Pfeiffer Turbomolecular Pump UnitOverall modular design, internally integrated front-end pump andMolecular pumpPlug and play, with a pumping speed range of 35 to 685 L/S and a maximum vacuum of 5X10-10 hPa, providingEconomic molecular pump group ECO,Classic molecular pump setandHigh performance turbo molecular pump set ProSuitable for different applications, recommended combinationsPfeiffer vacuum gaugeShared use

Due to the confidentiality of customer information, if you need further details or discussions, please refer to the following contact information
Shanghai Bodong: Ms. Ye Taiwan Bodong: Ms. Wang
T: +86-21-5046-3511 ext 109 T: +886-03-567-9508 ext 161
F: +86-21-5046-1490 F: +886-03-567-0049
M: +86 1391-883-7267 M: +886-939-653-958
ec@hakuto-vacuum.cn ec@hakuto.com.tw